Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8680424 | Microwave plasma processing device | Akira Kobayashi, Kouji Yamada, Hideo Kurashima, Tsunehisa Namiki, Takeshi Aihara | 2014-03-25 |
| 8487222 | Heating electrode and method for heating material-to-be-heated by using the heating electrode | Shinji Yamada, Hideo Kurashima, Mitsuhiro Yoshida, Takayoshi Otsu | 2013-07-16 |
| 7582845 | Microwave plasma processing device and plasma processing gas supply member | Akira Kobayashi, Kouji Yamada, Hideo Kurashima, Tsunehisa Namiki, Takeshi Aihara | 2009-09-01 |