Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906217 | Vapor deposited film by plasma CVD method | Hajime Inagaki, Satoru Kitou, Ryuta Nakano, Megumi Nakayama | 2011-03-15 |
| 7847209 | Method of forming a metal oxide film and microwave power source device used for the above method | Tsunehisa Namiki, Hideo Kurashima, Hajime Inagaki, Akira Kobayashi, Koji Yamada | 2010-12-07 |
| 7488683 | Chemical vapor deposited film based on a plasma CVD method and method of forming the film | Akira Kobayashi, Tsunehisa Namiki, Hiroko Hosono, Hideo Kurashima, Hajime Inagaki | 2009-02-10 |
| 6818310 | Silicon oxide film | Tsunehisa Namiki, Hideo Kurashima, Hajime Inagaki, Akira Kobayashi, Koji Yamada +1 more | 2004-11-16 |
| 6582778 | Method of treatment with a microwave plasma | Tsunehisa Namiki, Akira Kobayashi, Koji Yamada, Hideo Kurashima | 2003-06-24 |