Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051568 | Semiconductor manufacturing apparatus | Takuma Wada, Ryoto TAKIZAWA | 2024-07-30 |
| 11939678 | Method of making a semiconductor manufacturing apparatus member | Takuma Wada | 2024-03-26 |
| 11295934 | Member for semiconductor manufacturing device | — | 2022-04-05 |
| 11142829 | Semiconductor manufacturing apparatus member, and display manufacturing apparatus and semiconductor manufacturing apparatus comprising semiconductor manufacturing apparatus member | Takuma Wada | 2021-10-12 |
| 8597728 | Film forming method | Tomokazu Ito | 2013-12-03 |