Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393708 | Electrostatic chuck | Tetsuro ITOYAMA, Shuichiro Saigan, Jun Shiraishi | 2022-07-19 |
| 11145532 | Electrostatic chuck | Tetsuro ITOYAMA, Shuichiro Saigan, Jun Shiraishi | 2021-10-12 |