Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12395101 | Electrostatic chuck | Tetsuro ITOYAMA | 2025-08-19 |
| 12374574 | Electrostatic chuck | Akihito Ono, Tatsuya Hayakawa | 2025-07-29 |
| 12341049 | Electrostatic chuck including a heater element with mutiple heating zones | Akihito Ono | 2025-06-24 |
| 12341050 | Electrostatic chuck | Akihito Ono, Tetsuro ITOYAMA, Tomoki UMETSU | 2025-06-24 |
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Tomoki UMETSU, Tatsuya Hayakawa | 2023-11-28 |
| 11776836 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono | 2023-10-03 |
| 11756820 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono | 2023-09-12 |
| 10964579 | Electrostatic chuck | Tetsuro ITOYAMA | 2021-03-30 |
| 10923382 | Electrostatic chuck | Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii | 2021-02-16 |
| 10373854 | Electrostatic chuck | Hitoshi Sasaki, Kosuke Yamaguchi, Kengo Maehata, Yuichi Yoshii, Tetsuro ITOYAMA | 2019-08-06 |