Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7712514 | Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering | Charles Wickersham, John Edward Poole, Lin Zhu | 2010-05-11 |
| 7334479 | Systems and methods for non-contact measuring sputtering target thickness ultrasonics | — | 2008-02-26 |
| 7087142 | Method for determining a critical size of an inclusion in aluminum or aluminum alloy sputtering target | Charles Wickersham, John Edward Poole, Lin Zhu | 2006-08-08 |
| 6895342 | Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location | — | 2005-05-17 |
| 6739196 | Cleanliness evaluation in sputter targets using phase | — | 2004-05-25 |
| 6494098 | Method of ultrasonic on-line texture characterization | — | 2002-12-17 |
| 6487910 | Method and apparatus for quantitative sputter target cleanliness and characterization | — | 2002-12-03 |