Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462561 | Semiconductor device and manufacturing method thereof | Takashi Izumi, Akitsugu Hatazaki, Masaaki Hatano | 2022-10-04 |
| 10658162 | Semiconductor manufacturing apparatus | — | 2020-05-19 |
| 10446419 | Semiconductor manufacturing apparatus | — | 2019-10-15 |