Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741369 | Semiconductor manufacturing apparatus | — | 2020-08-11 |
| 10699882 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Takashi Ohashi | 2020-06-30 |
| 10079184 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Yuya Matsuda | 2018-09-18 |