Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164726 | Gas supply member, plasma processing apparatus, and method for forming coating film | Tetsuyuki Matsumoto, Makoto Saito | 2021-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164726 | Gas supply member, plasma processing apparatus, and method for forming coating film | Tetsuyuki Matsumoto, Makoto Saito | 2021-11-02 |