Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5030836 | Method and apparatus for drawing patterns using an energy beam | Naoki Kusui, Akira Suzuki, Katsuji Tanaka, Kuniyoshi Wakazaki, Mitsunobu Katayama +1 more | 1991-07-09 |
| 4641603 | Epitaxial growing apparatus | Yoshihiko Miyazaki, Yoshizo Komiyama, Kotei Iwata | 1987-02-10 |
| 4632060 | Barrel type of epitaxial vapor phase growing apparatus | Isao Sekiya | 1986-12-30 |