Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5122170 | Apparatus for preventing clouding of a semiconductor wafer | Kazuo Satoh, Hirofumi Okano, Kiyomi Suzuki | 1992-06-16 |
| 5039321 | Apparatus for preventing clouding of a semiconductor wafer | Kazuo Satoh, Hirofumi Okano, Kiyomi Suzuki | 1991-08-13 |