Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6225249 | Aluminum nitride sintered body, method of producing thereof, electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher using the same | Mitsuhiro Fujita, Shinichiro Aonuma, Shigeko Muramatsu | 2001-05-01 |