Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851739 | Quinonediazide/novolak positive electron beam resist developer | Hiroki Oosedo, Shigeyoshi Kanetsuki, Kazutaka Tamura, Masaya Asano | 1998-12-22 |
| 5629127 | Positive electron beam resist composition containing cresolnovolak resin, select additive and methyl gallate/1,2-naphthoquinonediazido-4-sulfonyl chloride reaction product | Hiroki Oosedo, Mayumi Kataoka, legal representative, Shigeyoshi Kanetsuki, Kazutaka Tamura, Masaya Asano | 1997-05-13 |
| 4800151 | Radiation-sensitive positive resist comprising a fluorine-containing alpha-chloroacetate copolymer in the specification | Atuto Tokunaga | 1989-01-24 |
| 4518675 | Stripper for radiosensitive resist | — | 1985-05-21 |
| 4301231 | Negative resist for high energy radiation | Yuji Atarashi | 1981-11-17 |