Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9243327 | Plasma CVD device and method of manufacturing silicon thin film | Tsunenori Komori, Takao Amioka | 2016-01-26 |
| 8431996 | Plasma processing apparatus and method of producing amorphous silicon thin film using same | Fumiyasu Nomura, Tsunenori Komori | 2013-04-30 |