Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274307 | Film thickness measurement device using interference of light and film thickness measurement method using interference of light | Masafumi Otsuki | 2019-04-30 |
| 8831910 | Method of measuring defect density of single crystal | Yoshitomo Shintani | 2014-09-09 |
| 7852489 | Method for measuring surface profile, and apparatus using the same | Masashi Sugiyama, Hidemitsu Ogawa, Kazuyoshi Suzuki | 2010-12-14 |
| 6501553 | Surface profile measuring method and apparatus | Hidemitsu Ogawa, Akira Hirabayashi | 2002-12-31 |
| 4693608 | Method and apparatus for determining position of points on article | Kouichi Tamura | 1987-09-15 |