Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859053 | Probe apparatus manufacturing method thereof and substrate inspecting method using the same | Kenji Sato, Hiromitu Wada, Koichi Mimura, Masanori Akita | 2005-02-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859053 | Probe apparatus manufacturing method thereof and substrate inspecting method using the same | Kenji Sato, Hiromitu Wada, Koichi Mimura, Masanori Akita | 2005-02-22 |