Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394558 | Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and manufacturing method of semiconductor device | Tadashi Matsuo, Shinpei Tamura | 2013-03-12 |
| 7838177 | Reflection type photomask blank, reflection type photomask, and method of manufacturing semiconductor device using the same | Tadashi Matsuo, Yasushi Nishiyama | 2010-11-23 |