Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498097 | Apparatus and method of forming preferred orientation-controlled platinum film using oxygen | Dong Yeon Park, Dong Su Lee, Hyun Jung Woo, Eui-Joon Yoon | 2002-12-24 |
| 6312567 | Method of forming a (200)-oriented platinum layer | Dong Su Lee, Dong Yeon Park, Eui-Joon Yoon, Min-Hong Kim, Hyun Jung Woo +1 more | 2001-11-06 |
| 6054331 | Apparatus and methods of depositing a platinum film with anti-oxidizing function over a substrate | Hyun Jung Woo, Dong Yeon Park, Dong Su Lee, Eui-Joon Yoon | 2000-04-25 |
| 6025205 | Apparatus and methods of forming preferred orientation-controlled platinum films using nitrogen | Dong Yeon Park, Dong Su Lee, Hyun Jung Woo, Eui-Joon Yoon | 2000-02-15 |
| 5981390 | Method for depositing a platinum layer on a silicon wafer | Dong Su Lee, Dong Yeon Park, Jo-Woong Ha, Eui-Joon Yoon, Min-Hong Kim +1 more | 1999-11-09 |
| 5736422 | Method for depositing a platinum layer on a silicon wafer | Dong Su Lee, Dong Yeon Park, Jo-Woong Ha, Eui-Joon Yoon, Min-Hong Kim +1 more | 1998-04-07 |