| 7754003 |
Coating composition and low dielectric siliceous material produced by using same |
Hiroyuki Aoki |
2010-07-13 |
| 7368491 |
Phosphorus-containing silazane composition, phosphorus-containing siliceous film, phosphorus-containing siliceous filler, method for producing phosphorus-containing siliceous film, and semiconductor device |
Hiroyuki Aoki |
2008-05-06 |
| 6767641 |
Method for sealing fine groove with siliceous material and substrate having siliceous coating formed thereon |
Yasuo Shimizu, Yuuji Tashiro |
2004-07-27 |
| 6746714 |
Porous silica coating with low dielectric constant, semiconductor device and coating composition |
Yasuo Shimizu |
2004-06-08 |
| 6310168 |
Aminated polysilazane and process for the preparation thereof |
Yasuo Shimizu, Osamu Funayama |
2001-10-30 |
| 5459114 |
Method for producing ceramic products |
Hiroshi Kaya, Kiyoshi Sato, Hiroki Morozumi, Atushi Tezuka, Hirohiko Nakahara +2 more |
1995-10-17 |
| 5436398 |
Polymetalosilazane, process of producing same, silicon nitride based ceramic, and process of preparing same |
Yasuo Shimizu, Hirohiko Nakahara, Osamu Funayama, Takeshi Isoda |
1995-07-25 |
| 5359114 |
Silane compound and processes for the preparation thereof |
Satoshi Ueki, Tadanao Kohara |
1994-10-25 |
| 5248803 |
Silane compound and processes for the preparation thereof |
Kunihiko Imanishi, Ryuji Sato, Satoshi Ueki, Yoshiharu Okumura, Tadanao Kohara |
1993-09-28 |
| 5142082 |
Silane compound and processes for the preparation thereof |
Ryuji Sato, Satoshi Ueki, Yoshiharu Okumura |
1992-08-25 |