Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7117110 | Measuring method and measuring apparatus | Nozomi Takai | 2006-10-03 |
| 7098668 | Digital measuring head | — | 2006-08-29 |
| 6987388 | Digital measuring head | — | 2006-01-17 |
| 5931725 | Wafer polishing machine | Takao Inaba, Kenji Sakai, Minoru Numoto, Hisashi Terashita | 1999-08-03 |
| 5876272 | Semiconductor wafer polishing machine | Takao Inaba, Kenji Sakai | 1999-03-02 |