Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429738 | Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern | Akihiko Nakata, Tsukasa Sugawara | 2019-10-01 |