YM

Yuuji Matsuyama

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,633,842 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5908657 Coating apparatus and method of controlling the same Yoshio Kimura, Satoshi Morita 1999-06-01
5733375 Apparatus for supplying a treatment material Takahide Fukuda, Shinichiro Izumi, Yoshio Kimura, Satoshi Morita, Kunie Tsunematsu 1998-03-31
5711809 Coating apparatus and method of controlling the same Yoshio Kimura, Satoshi Morita 1998-01-27