Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087553 | Gas supply ring and substrate processing apparatus | — | 2024-09-10 |
| 11862436 | Plasma processing apparatus and plasma processing method | Toru Fujii, Kohei Otsuki | 2024-01-02 |
| 11791195 | Substrate processing apparatus | — | 2023-10-17 |
| 11183371 | Plasma processing apparatus and plasma processing method | Toru Fujii, Kohei Otsuki | 2021-11-23 |