Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605712 | Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate | Shimpei Yamaguchi, Atsushi Tsuboi, Atsushi Endo, Masaru Sugimoto, Hiroshi Yano +1 more | 2023-03-14 |
| 6852194 | Processing apparatus, transferring apparatus and transferring method | Minoru Matsushita, Toshikazu Kumai | 2005-02-08 |