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TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,135,175 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8889023 Plasma processing apparatus and plasma processing method Naoki Matsumoto, Wataru Yoshikawa, Kazuyuki Kato 2014-11-18