YK

Yasuhiro Kitada

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,850,074 of 4,157,543Top 70%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10249034 Substrate defect inspection apparatus, method of adjusting sensitivity parameter value for substrate defect inspection, and non-transitory storage medium Izumi Hasegawa, Hiroshi Tomita, Kousuke NAKAYAMA, Tadashi Nishiyama 2019-04-02