YT

Yasuaki TANIIKE

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #1,754,880 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11942308 Microwave plasma source, microwave plasma processing apparatus and plasma processing method — 2024-03-26
11056317 Microwave plasma source, microwave plasma processing apparatus and plasma processing method — 2021-07-06