TO

Tokuhisa OIWA

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,419,369 of 4,157,543Top 60%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12315704 Plasma processing apparatus, and method and program for controlling elevation of focus ring Yusuke Saitoh 2025-05-27