Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8808788 | Processing a wafer with a post application bake (PAB) procedure | — | 2014-08-19 |
| 7935545 | Method and apparatus for performing a site-dependent dual patterning procedure | Mark Winkler | 2011-05-03 |
| 7842519 | In-line lithography and etch system | Mark Winkler | 2010-11-30 |
| 7783374 | Method and apparatus for performing a site-dependent dual damascene procedure | Mark Winkler | 2010-08-24 |
| 7741583 | Bake plate lid cleaner and cleaning method | Mark Winkler | 2010-06-22 |
| 7729795 | Method and apparatus for verifying a site-dependent wafer | Mark Winkler | 2010-06-01 |
| 7673582 | Apparatus and method for removing an edge bead of a spin-coated layer | — | 2010-03-09 |
| 7670643 | Method and system for dispensing resist solution | Minoru Kubota | 2010-03-02 |
| 7650200 | Method and apparatus for creating a site-dependent evaluation library | Mark Winkler | 2010-01-19 |
| 7596423 | Method and apparatus for verifying a site-dependent procedure | Mark Winkler | 2009-09-29 |
| 7531368 | In-line lithography and etch system | Mark Winkler | 2009-05-12 |
| 7373216 | Method and apparatus for verifying a site-dependent wafer | Mark Winkler | 2008-05-13 |