TK

Tatsuya Kawaji

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,463,902 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10217652 Heat treatment apparatus, heat treatment method, and storage medium Masato Mizuta, Keigo Nakano 2019-02-26
8186077 Heating apparatus, heating method, and computer readable storage medium Yuichi Sakai, Masatoshi Kaneda 2012-05-29
7992318 Heating apparatus, heating method, and computer readable storage medium Yuichi Sakai, Masatoshi Kaneda 2011-08-09