Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114318 | Assembling apparatus and assembling method for semiconductor manufacturing apparatus | Hisashi Inoue, Masahiro Kobayashi, Michihiro Takahashi, Harunari Hasegawa, Hiroshi Kikuchi +1 more | 2021-09-07 |
| 10518986 | Method for conveying reaction tube unit | Masahiro Kobayashi, Harunari Hasegawa, Michihiro Takahashi, Daisuke YAMANAKA | 2019-12-31 |