Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8506718 | Polymer removing apparatus and method | Masaki Kondo | 2013-08-13 |
| 8497132 | Ozone gas concentration measurement method, ozone gas concentration measurement system, and substrate processing apparatus | — | 2013-07-30 |
| 8454752 | Foreign substance removing apparatus, foreign substance removing method, and storage medium | Masaki Kondo | 2013-06-04 |