SK

Soichi Kanno

TL Tokyo Electron Limited: 4 patents #1,723 of 5,567Top 35%
Overall (All Time): #1,172,931 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10847350 Heat treatment apparatus 2020-11-24
8636409 Heat treatment apparatus and temperature measuring method thereof 2014-01-28
5875416 Temperature adjusting method and apparatus therefor using at least two temperature sensors and a correction value 1999-02-23
5777881 Method of deciding control parameters of heat treatment instrument and apparatus thereof 1998-07-07