ST

Shusei Takebayashi

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,516,826 of 4,157,543Top 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12046485 Substrate processing apparatus and method of cleaning substrate processing apparatus — 2024-07-23