Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6336054 | Interlock apparatus for a transfer machine | Yoshiharu Ota, Masaaki Yoshida, Tatsuya Iwasaki | 2002-01-01 |
| 6203617 | Conveying unit and substrate processing unit | Shinichiro Araki, Tatsuya Iwasaki, Eiichiro Kamada | 2001-03-20 |
| 5963449 | Interlock apparatus for a transfer machine | Yoshiharu Ota, Masaaki Yoshida, Tatsuya Iwasaki | 1999-10-05 |