SS

Shingo Shimogama

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Rifu, JP: #1,311 of 2,101 inventorsTop 65%
Overall (All Time): #2,929,315 of 4,157,543Top 75%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9558919 Method of modifying electrostatic chuck and plasma processing apparatus Takamitsu KONDO 2017-01-31