SO

Shin Osada

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Yamanashi, JP: #1,377 of 1,957 inventorsTop 75%
Overall (All Time): #3,317,420 of 4,157,543Top 80%
1
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7490010 Data collection method, substrate processing apparatus, and substrate processing system — 2009-02-10