Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820329 | Vacuum processing apparatus with low particle generating wafer clamp | Richard Parker | 1998-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820329 | Vacuum processing apparatus with low particle generating wafer clamp | Richard Parker | 1998-10-13 |