Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928806 | Device for controlling substrate processing apparatus and method for displaying substrate processing | — | 2021-02-23 |
| 9558304 | Substrate processing apparatus, simulation apparatus, storage medium and simulation method | Kimitoshi Miura | 2017-01-31 |
| 8209042 | Server device, information processing method and program | — | 2012-06-26 |