RH

Ryuta Higuchi

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
📍 Rifu, JP: #1,001 of 2,101 inventorsTop 50%
Overall (All Time): #1,756,079 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11948782 Control system, control method, recording medium storing control program, and processing system 2024-04-02
10903049 Plasma processing apparatus and measurement circuit 2021-01-26