Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5997686 | Process for setting a working rate distribution in an etching or plasma CVD apparatus | Marcel Lardon, Paul Muralt | 1999-12-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5997686 | Process for setting a working rate distribution in an etching or plasma CVD apparatus | Marcel Lardon, Paul Muralt | 1999-12-07 |