Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332630 | Information processing apparatus and substrate processing method | Hiroshi Ogino, Masanori Saito, Yasuhiro Tsuruma | 2025-06-17 |
| 11681268 | Semiconductor manufacturing system, control device, and control method | Kenichi Kobayashi, Takehiro KINOSHITA, Takashi Oe | 2023-06-20 |