Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6719849 | Single-substrate-processing apparatus for semiconductor process | Takahiro Horiguchi | 2004-04-13 |
| 6506257 | Single-substrate-processing apparatus for semiconductor process | Takahiro Horiguchi, Hiroshi Kaneko | 2003-01-14 |