Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368041 | Cleaning method of cup of substrate processing apparatus and substrate processing apparatus | — | 2025-07-22 |
| 11565287 | Substrate processing apparatus, substrate processing method and computer-readable recording medium | — | 2023-01-31 |
| 11207717 | Substrate processing apparatus, substrate processing method and computer-readable recording medium | — | 2021-12-28 |
| 9617109 | Image recording apparatus | Yasuhira Ota, Noriyuki Kawamata | 2017-04-11 |