Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522293 | Optical metrology of multiple patterned layers | Li-Fen Wu, Elina Szeto | 2009-04-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522293 | Optical metrology of multiple patterned layers | Li-Fen Wu, Elina Szeto | 2009-04-21 |