MH

Masahito Hiratuka

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
TL Tokyo Electron Yamanashi Limited: 1 patents #52 of 138Top 40%
Overall (All Time): #3,812,161 of 4,157,543Top 95%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5368684 Etching method for a silicon-containing layer using hydrogen bromide Yoshio Ishikawa, Hiroshi Kojima 1994-11-29