Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7840299 | Substrate collection method and substrate treatment apparatus | Akira Miyata, Yoshitaka Hara | 2010-11-23 |
| 7383093 | Substrate processing apparatus and substrate processing method | Akira Miyata | 2008-06-03 |
| 7379785 | Substrate processing system, coating/developing apparatus, and substrate processing apparatus | Akira Miyata | 2008-05-27 |
| 7210864 | Coating and developing apparatus | Akira Miyata | 2007-05-01 |
| 7191033 | Substrate processing apparatus and substrate processing method | Akira Miyata | 2007-03-13 |
| 6981808 | Substrate processing apparatus and substrate transferring method | Akira Miyata, Shigeki Wada | 2006-01-03 |