Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830774 | Coating method | Shinichi Hayashi, Hirofumi Ookuma | 2004-12-14 |
| 6790283 | Coating apparatus | Shinichi Hayashi, Hirofumi Ookuma | 2004-09-14 |
| 5130540 | Method and apparatus for automatic focusing of scanning electron microscope | Atsushi Yamada, Mitsuru Yamada, Tsutomu Negishi, Kunihiko Uchida | 1992-07-14 |