Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473182 | Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component | Satoshi Nishimura | 2022-10-18 |
| 10808309 | Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component | Satoshi Nishimura | 2020-10-20 |
| 9828690 | Component of substrate processing apparatus and method for forming a film thereon | — | 2017-11-28 |
| 8999475 | Component of substrate processing apparatus and method for forming a film thereon | — | 2015-04-07 |