Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134578 | Housing and substrate processing apparatus including the same | — | 2018-11-20 |
| 9447926 | Plasma process method | Naomi Onodera, Jun Sato | 2016-09-20 |
| 8683943 | Plasma process apparatus and plasma process method | Naomi Onodera, Jun Sato | 2014-04-01 |